WoT
damproc_vaporLevel 1

Chemical and Physical Vapor Deposition

GET/api/v1/systems/domain_materials_process/nodes/damproc_vapor

Hierarchy Explorer

Hierarchy Explorer
damproc_vapor_aldAtomic Layer Deposition (ALD) for conformal coatings
damproc_vapor_cvdCVD (MOCVD, LPCVD, PECVD) thin film growth
damproc_vapor_pvdPVD sputtering and evaporation (magnetron, e-beam)

Cross-system equivalences0

No cross-system equivalences mapped for this node.