damproc_vaporLevel 1

Chemical and Physical Vapor Deposition

GET/api/v1/systems/domain_materials_process/nodes/damproc_vapor

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damproc_vapor_aldAtomic Layer Deposition (ALD) for conformal coatings

damproc_vapor_cvdCVD (MOCVD, LPCVD, PECVD) thin film growth

damproc_vapor_pvdPVD sputtering and evaporation (magnetron, e-beam)

No cross-system equivalences mapped for this node.