Spectrometry, Mass, Secondary Ion

**Definition:** A mass-spectrometric technique that is used for microscopic chemical analysis. A beam of primary ions with an energy of 5-20 kiloelectronvolts (keV) bombards a small spot on the surface of the sample under ultra-high vacuum conditions. Positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer in regards to their mass-to-charge ratio. Digital imaging can be generated from the secondary ion beams and their intensity can be measured. Ionic images can be correlated with images from light or other microscopy providing useful tools in the study of molecular and drug actions.

**Tree numbers:** - E05.196.566.760

**Synonyms:** - Secondary Ion Mass Spectroscopy Microscopy - Mass Spectrometry, Secondary Ion - Secondary Ion Mass Spectrometry - Secondary Ion Mass Spectroscopy - Mass Spectroscopy, Secondary Ion - Spectroscopy, Mass, Secondary Ion - Secondary Ion Mass Spectrometry Microscopy - SIMS Microscopy