Micro-Electrical-Mechanical Systems

**Definition:** A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.

**Tree numbers:** - E07.305.343 - J01.637.509

**Synonyms:** - MEMS - Micro-Electro-Mechanical Systems