G01QLevel 3
SCANNING-PROBE TECHNIQUES OR APPARATUS
**Definition:** This place covers:
Scanning probes, i.e. devices having at least a tip of nanometre sized dimensions that scans or moves over an object surface, typically at a distance of a few angstroms or nanometres, monitoring some interaction between the tip and the surface, e.g. monitoring the generation of a tunnelling current.
Techniques or apparatus involving the use of scanning probes.
The following subjects are therefore covered, the list being non-exhaustive:
**Limiting references (this place does not cover):** - Electron or ion microscopes (e.g. scanning electron microscopes, transmission electron microscopes) and details thereof -> H01J37/00
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